US Patent 7948042 - Graphene-based MEMS

http://www.freepatentsonline.com/7948042.html

This patent is from the Regents of the University of California and teaches how graphene can be use to form pn and npn control structures for microelectromechanical systems. Claim 1 reads:

1. A suspended structure, comprising:

a substrate having a first surface;

an electrically conductive structure suspended above the first surface of the substrate;

a graphene layer positioned upon the first surface of the substrate and beneath the suspended electrically conductive structure; and

a dielectric interposed between the electrically conductive suspended structure and the graphene layer.