US Patent 7922796 - Chemically modified CNT filters

http://www.freepatentsonline.com/7922796.html

This patent from IBM teaches a molecular filter intended for use in 21st century semiconductor clean rooms which use carbon nanotube mats. Claim 1 reads:

1. A filter, comprising:

a filter housing having an inlet and a separate outlet;

a layer of porous walled and closed containers in said filter housing; and

each porous walled and closed container of said layer holding a tangled collection of individual chemically active carbon nanotubes stuck together in a mat, said chemically active carbon nanotubes comprising a chemically active layer formed on carbon nanotubes or comprising organic chemically reactive groups on sidewalls of said carbon nanotubes.