US Patent 7731503 - CNT contact structure

http://www.freepatentsonline.com/7731503.html

FormFactor Inc. is a company which produces probe card equipment used in testing semiconductor equipment. This patent teaches using carbon nanotubes as the probe contact which may provide higher resolution testing. Claim 1 reads:

1. A contact structure comprising:

an interconnection element having a first portion that is constructed and arranged for mounting on a substrate and making an electrical connection thereto; and

a contact element attached to the interconnection element and configured to contact a pad on a semiconductor device, wherein the contact element comprises:

an electrically conductive base attached to the interconnection element, and

a plurality of carbon nanotubes coupled to and extending away from a surface of the base.