US Patent 7710709 - CNT coated capacitor electrodes

http://www.freepatentsonline.com/7710709.html

This patent from Intel teaches the use of carbon nanotubes in forming electrodes for a capacitor which produces a large capacitance with lower thermal mismatch to organic substrates than ceramic capacitors. Claim 1 reads:

1. A device comprising:

a substrate;

a capacitor formed on the substrate, the capacitor comprising first and second electrodes and a capacitor dielectric between the first and second electrodes;

wherein at least one of the first and second electrodes comprises a metal layer and carbon nanotubes coupled thereto; and

wherein a plurality of the carbon nanotubes are in contact with the capacitor dielectric.