US Patent 7538474 - MEMS testing via phonon stimulation
http://www.freepatentsonline.com/7538474.html
This patent from the National University of Singapore teaches a new reliability testing system for MEMS devices based on an acoustic sensing method which can be less invasive than previous methods. Claim 1 reads:
1. A system for Micro Electro Mechanical System (MEMS) device characterization, the system comprising:
a stimulator for stimulating the device to generate phonons in the device;
a detector for detecting the generated phonons; and
a converter for converting the phonons into a signal representative of displacement of a MEMS component of the device.
This patent from the National University of Singapore teaches a new reliability testing system for MEMS devices based on an acoustic sensing method which can be less invasive than previous methods. Claim 1 reads:
1. A system for Micro Electro Mechanical System (MEMS) device characterization, the system comprising:
a stimulator for stimulating the device to generate phonons in the device;
a detector for detecting the generated phonons; and
a converter for converting the phonons into a signal representative of displacement of a MEMS component of the device.
Labels: National University of Singapore
posted by blaisemouttet at 5:06 PM
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