US Patent 7463116 - Complementary MEMS resonators

http://www.freepatentsonline.com/7463116.html

This patent from Sony teaches a microresonator array configured to balance oscillation forces leading to more stable operation. Claim 1 reads:

1. A micro-resonator comprising:

a plurality of micro-resonant elements having a beam structure facing an input electrode and an output electrode which use a micromechanical oscillation provided on the same substrate, wherein, a micro-resonant element to oscillate in a first phase and a micro-resonant element to oscillate in a second phase that is a reverse phase to the first phase are disposed to be a pair.