US Patent 7437938 - High modulus CNT diaphragm sensor

http://www.freepatentsonline.com/7437938.html

This patent from Rosemount Inc. teaches a high resolution pressure sensor formed from nanowires or nanotubes providing a high Young's modulus. Claim 1 reads:

1. A sensor comprising:

a composite structure formed by a mat of nanotubes or nanowires embedded in insulating material, wherein the composite structure has a Young's modulus of greater than about 1000 GPa; and

electrodes for deriving a sensor signal in response to deflection of the composite structure in response to a physical parameter, at least one of the electrodes connected to the mat.